ACCELERATION SENSOR

摘要

[PROBLEMS] To provide an acceleration sensor reduced in size, capable of eliminating effects thereon by the causes other than acceleration such as temperature variation, and providing high detection sensitivity. [MEANS FOR SOLVING PROBLEMS] This acceleration sensor (1A) comprises a bimorph acceleration detection element (2A) in which first and second resonators (3) and (4) are joined to both faces of a base plate (5) in the acceleration application direction. The longitudinal one end part or both end parts of the detection element (2A) are fixedly supported so that the resonators (3) and (4) can be deflected in a same direction according to the application of the acceleration, and the frequency variation or impedance variation of the resonators (3) and (4) caused by the deflection of the detection element (2A) is detected differentially so that the acceleration can be detected. The bending neutral surface (N1) of the acceleration detection element (2A) in the action of the acceleration is positioned at the center part of the base plate (5) in the acceleration application direction, the electrodes of the resonators (3) and (4) are installed on the principal planes thereof orthogonal to the acceleration application direction, and the heights (H1) of the resonators (3) and (4) in a direction perpendicular to the accelerator application direction are smaller than the height (H2) of the base plate (5).