LORENTZ MOTOR CONTROL SYSTEM FOR A PAYLOAD

摘要

Control arrangement for and method of controlling a plurality of Lorentz motors (1, 2) actuating a payload (4) where the payload has a center of gravity (12). Height signals (z1,z2) are received from sensors sensing heights of said payload. At least one angle of rotation of the center of gravity about a horizontal axis is calculated from these height signals (z1, z2) and from this at least one angle of rotation control signals (C1, C2) for the Lorentz motors (1, 2) are calculated such that a predetermined rotational stiffness for supporting the payload (4) is achieved.A typical application is a suspension for floor vibration isolation of an electron microscope or of a lithographic apparatus.