| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a composition for ferroelectric film formation and a ferroelectric film, as well as its manufacturing method wherein the occurring of a striation is effectively prevented and the selection range for sol compositions can be broadened. <P>SOLUTION: In the composition for ferroelectric film formation containing a metal compound which is a material to form the ferroelectric thin film, this is provided with a hydrophobic compound which has a reactive group to react with a hydroxyl group, and in which at least the end part side out of the remaining part excluding the reactive group is made to have hydrophobic property. By this, the selections for the sol compositions can be broadened while the occurrence of the striation is effectively suppressed. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
