| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probing pad which can be located properly and can be reduced in dominant area when arranged in in a plurality of rows, a mask pattern which constitutes the probing pad, and an electronic device equipped with the probing pad. <P>SOLUTION: The probing pads 11-14 receive probes 21-24 which move along the surface of a substrate and are made to abut against the probes 21-24. The probing pads 11-14 have such shapes that their widths are gradually increased from front ends 11A-14A, where the probes are received along the forward direction of movement of the probes, and that a center line passing through the center in the widthwise direction coincides with the movement direction of the probe. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
