| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional confocal laser microscope system capable of stably obtaining a confocal slice image of a sample by automatically calculating a scanning waveform suppressing vibrations, driving an actuator by the use of the waveform and scanning a focal surface of microscope objective lens in the optical axis direction. SOLUTION: The three-dimensional confocal laser microscope system is provided with a confocal scanner that gains the slice image of the sample as a confocal image, a video rate camera that converts the confocal image to video signals, an image processor that converts the video rate signals to image data, the actuator that replaces a focal position of the objective lens of the microscope to the optical axis direction and a control means that produces a scanning waveform signal for scanning the objective lens in the optical axis direction via the actuator, and is constituted so as to obtain the slice image in the depth direction of the sample. Therein, the control means produces the scanning waveform signal which is a triangular or stepwise scanning waveform and, on a discontinuous change part, is corrected so that the acceleration becomes substantially constant and drives the actuator according to the scanning waveform signal. COPYRIGHT: (C)2005,JPO&NCIPI
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