A pattern drawing device using a microlens. A substrate is moved within the duration from a pulse to the next pulse generated from an ultraviolet light source. The movement distance is shorter than the spot interval and longer than the difference of the subtraction of the spot diameter from the spot interval in order to facilitate calculation of a gray scale for adaptation to a micro design grid. After scanning for every pulse output, spots are connected in the scan direction, thus drawing a continuous line. In a direction perpendicular to the scan direction, a discrete line is drawn. Therefore, the perpendicular direction a step movement equal to the spot diameter or less is made after one scan ends.
