摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator capable of reducing variation in displacement even when surface electrodes are arranged with high density by preventing unnecessary piezoelectric oscillation, and to provide an ink jet recording head comprising it. <P>SOLUTION: An internal electrode 12, a piezoelectric ceramic layer 13 and a surface electrode 14 are formed in this order on a diaphragm 16 and a plurality of surface electrodes 14 are arranged on the surface of the piezoelectric ceramic layer 13 in the piezoelectric actuator 18. A plurality of internal electrodes 12 are arranged oppositely to the surface electrode 14 through the piezoelectric ceramic layer 13 wherein a lead-out electrode 14a connected with the end part of the surface electrode 14 and a lead-out electrode 12a connected with the end part of the internal electrode 12 are arranged at positions not overlapping each other through the piezoelectric ceramic layer 13. In the ink jet recording head, the piezoelectric actuator 18 is fixed onto a channel member 20 while arranging the positions of an ink channel 23, the surface electrode 14 and the internal electrode 12. <P>COPYRIGHT: (C)2005,JPO&NCIPI |