MANUFACTURING METHOD OF LIQUID EJECTION HEAD

摘要

PROBLEM TO BE SOLVED: To shorten a work process while maintaining the shape of a sacrificial layer uniform for each of a large number of substrates taken from a wafer. SOLUTION: The method of manufacturing the liquid ejection head having a substrate 11 equipped with an electrothermal conversion body 13 which ejects liquid from the ejection port 16, an electrode wiring section 26 which electrically connects the electrothermal conversion body 13 and its drive elements 21 to 23 and a liquid supply port 12 penetrating the substrate comprises a process to form a sacrificial layer at the formation position of the liquid supply port 12 by using the same material as the electrode wiring section 26 when forming the electrode wiring section 26; a process to form an anti-etching layer which covers the sacrificial layer; a process to eliminate the sacrificial layer by etching the substrate 11 from the surface opposite to the surface where the electrothermal conversion body 13 is formed to expose the portion of the anti-etching layer corresponding to the liquid supply port 12; and a process to form the liquid supply port 12 on the substrate 11 by eliminating the exposed anti-etching layer. COPYRIGHT: (C)2005,JPO&NCIPI