| 发明名称 |
COLOR VARIATION COMPENSATION ALGORITHM FOR BRIGHT FIELD WAFER INSPECTION |
| 摘要 |
<p>Gray level variations between images of dies produced using a bright filed inspection system may be measured to produce measured statistics; and one or more of those measured statistics applied as a correction factor for a difference image produced by a comparison of two of the images of dies. The measured statistics may be average gray level variations across one or more of the images of dies</p> |
| 申请公布号 |
WO2005013199(A1) |
申请公布日期 |
2005.02.10 |
| 申请号 |
WO2004US23571 |
申请日期 |
2004.07.21 |
| 申请人 |
APPLIED MATERIALS ISRAEL, LTD.;APPLIED MATERIALS, INC.;BARTOV, AVISHAI |
发明人 |
BARTOV, AVISHAI |
| 分类号 |
G06T7/00;(IPC1-7):G06T7/00;G06T5/50 |
主分类号 |
G06T7/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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