| 摘要 |
PROBLEM TO BE SOLVED: To enhance the processing capability of a vacuum processor by shortening the transportation time and the carry-in/out time of an object to be processed. SOLUTION: A load-lock mechanism is arranged in a vacuum container. A holding mechanism arranged in the vacuum container holds the object to be processed, and moves the object from a processing position to a transferring position and vice versa. When the holding mechanism holds the object to be processed in the transferring position, inner arms can exchange the object to be processed in the transferring position with the object to be processed held by the load-lock mechanism. The inner arms include a first arm and a second arm which can turn mutually independently. The first arm and the second arm are held mutually in different positions in the directions of their turning shafts, and turning of the first arm moves the object to be processed from the transferring position to the first load-lock mechanism, and simultaneously turns the second arm in the reverse direction, moving the other object to be processed from the load-lock mechanism to the transferring position. COPYRIGHT: (C)2005,JPO&NCIPI
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