TANTALUM CARBIDE, METHOD FOR PRODUCING TANTALUM CARBIDE, TANTALUM CARBIDE WIRING AND TANTALUM CARBIDE ELECTRODE

摘要

Disclosed is a method for forming a tantalum carbide having a certain shape in a simple manner. This method also enables to form a tantalum carbide having a uniform thickness even when the tantalum carbide is formed on the surface of an article, and such a tantalum carbide will not be separated by the thermal history. Also disclosed are a tantalum carbide, tantalum carbide wiring and tantalum carbide electrode obtained by such a method. The method for forming a tantalum carbide is characterized as follows: tantalum or a tantalum alloy is placed in a vacuum heat treating furnace and heat treatment is conducted under the conditions where a natural oxide film, i.e. Ta2O5, formed on the surface of the tantalum or tantalum alloy is sublimed; and after removing the Ta2O5 film, a carbon source is introduced into the vacuum heat treating furnace so that a tantalum carbide is formed on the surface of the tantalum or tantalum alloy.