| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device which protects objects disposed in the blowoff direction of a plasma blowoff means from plasma. <P>SOLUTION: A treatment gas is passed through between electrodes 33, 34 to be made into plasma and blown off downward by a plasma blowoff means 20, while an object W to be treated is transferred by a roller conveyer 10 such that it traverses underneath the plasma blowoff means 20. The roller conveyer directly under the plasma blowoff means 20 is covered with a protective cover 51 composed of glass (a plasma-resistive material). In the protective cover 51, there are formed roller through-holes 51d where upper edges of rollers 12 emerge. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
