发明名称 |
Method for making an integrated circuit comprising an active optical device having an energy band engineered superlattice |
摘要 |
A method for making an integrated circuit may include forming at least one active optical device including a superlattice including a plurality of stacked groups of layers. Each group of layers of the superlattice may include a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and an energy band-modifying layer thereon. The energy-band modifying layer may include at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The method may further include forming a waveguide coupled to the at least one active optical device.
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申请公布号 |
US2005032247(A1) |
申请公布日期 |
2005.02.10 |
申请号 |
US20040936933 |
申请日期 |
2004.09.09 |
申请人 |
RJ MEARS, LLP |
发明人 |
MEARS ROBERT J.;STEPHENSON ROBERT JOHN |
分类号 |
H01L21/8238;H01L29/10;H01L29/15;H01L29/78;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/8238 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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