发明名称 Method for manufacturing light guide plate stamper
摘要 A method for manufacturing a light guide plate (LGP) stamper (26) includes the steps of: forming a photo-resist film (21) on a substrate (30); exposing and developing the photo-resist film to form micro patterns (21'); etching the substrate by means of a dry etching method to form a perform including the stamper; and stripping off residual patterns from the substrate to form the LGP stamper.
申请公布号 US2005031998(A1) 申请公布日期 2005.02.10
申请号 US20040914882 申请日期 2004.08.09
申请人 CHEN GA-LANE;TSAI KUN-JUNG;YU TAI-CHERNG 发明人 CHEN GA-LANE;TSAI KUN-JUNG;YU TAI-CHERNG
分类号 F21V8/00;G03F7/00;G03F7/36;(IPC1-7):G03F7/36 主分类号 F21V8/00
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