FLUORINE-CONTAINING COMPOUND, FLUORINE-CONTAINING POLYMER, METHOD FOR PRODUCING SAME AND RESIST COMPOSITION CONTAINING SAME

摘要

A fluorine-containing polymer is disclosed which has a functional group and exhibits high transparency over a wide wavelength range. Also disclosed is a resist composition composed of such a fluorine-containing polymer. A fluorine-containing polymer (A) has a monomer unit wherein a fluorine-containing diene represented by the formula (1) below is polymerized. A method for producing the fluorine-containing polymer (A) and a resist composition using the fluorine-containing polymer (A) as the base material are also disclosed. CF2=CFCH2CH-Q-CH2CH=CH2 (1) In the above formula, Q represents (CH2)aC(CF3)2OR<4> (wherein a is an integer of 0-3, and R<4> represents an alkyl group having 20 or less carbon atoms which may have an ether oxygen atom, a fluorine-containing alkyl group, an alkoxycarbonyl group having 6 or less carbon atoms, or CH2R<5> (wherein R<5> is an alkoxycarbonyl group having 6 or less carbon atoms)), or (CH2)dCOOR<6> (wherein d is 0 or 1, and R<6> represents an hydrogen atom, an alkyl group having 20 or less carbon atoms or a fluorine-containing alkyl group).