<p>A mechanochmical type sensor characterized by comprising a micro mechanical structure having a functional thin film formed on at least a part of its surface, a support means supporting the micro mechanical structure, and a detection means detecting a change in the mechanical physical properties of the micro mechanical structure. The use of the micro mechanical structure having the functional thin film integrated therewith in advance increases the strength of conjugation between the functional thin film and the micro structure, so that a high detection signal can be obtained, making it possible to improve the measuring accuracy and measuring sensitivity.</p>
