| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source capable of generating ion beam having an oblong cross-section with excellent uniformity within the cross-section. SOLUTION: The ion source 2 comprises a scanning electron source 4 generating electron 10 scanned in an X direction, and a vessel in which the electron 10 is made incident from the scanning electron source 4, gas 28 introduced, generating plasma 32 by ionizing the gas 28 by the impact shock of the electrons 10. The ion source 2 is provided with the plasma-generating vessel 22 with an ion extraction slit 30 extended along the X direction and an extraction electrode system fitted outside the plasma-generating vessel made of one or more electrodes and extracting ion beams of a cross-section slim shape from the plasma 32 through the ion extraction slit 30 of the plasma-generating vessel 22. COPYRIGHT: (C)2005,JPO&NCIPI
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