| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus for inspecting a circuit board precisely and quickly. SOLUTION: The inspection apparatus comprises a line L1 for measurement connected to an inspection probe 3a; a measurement line L2 fixed to the inspection probe 3a in an insulated state; a switching section 7 for switching the lines L1, L2 for measurement; a measurement section 6 for executing first measurement processing for measuring the electric parameters between the inspection probe 3a and an electrode 2b via the line L1 for measurement, and second measurement processing for measuring the electric parameters between the line L2 for measurement and the electrode 2b via the measurement line L2; and a control section 8 for executing the first and second measurement processing after bringing the inspection probe 3a into contact with a conductive pattern, and inspects the circuit board, based on the electric parameters with the differential value of the two measured electric parameters as normal electric parameters. COPYRIGHT: (C)2005,JPO&NCIPI
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