| 摘要 |
A method of fabricating a flash memory device includes depositing and etching an insulating layer on a substrate having STI structures, depositing a first polysilicon layer over the insulating layer and the substrate, etching the first polysilicon layer to form floating gates and removing the insulating layer. The method also includes forming a first photoresist pattern, performing a first ion implantation using the first photoresist pattern to form first source/drain regions in the substrate and adjacent to the floating gate, removing the first photoresist pattern, depositing an ONO layer on the resulting structure, depositing a second polysilicon layer over the ONO layer, and etching the second polysilicon layer to form a control gate and at least one select gate. The method concludes by forming a second photoresist pattern and performing a second ion implantation using the second photoresist pattern to form second source/drain regions in the substrate and adjacent to the select gate.
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