发明名称 Semiconductor device and method of manufacturing the same
摘要 The semiconductor device has a low-resistance layer provided under the interconnection extending from the signal input to a gate of MOSFET. The low-resistance layer decreases the substrate resistance and the noise characteristic of the semiconductor device can also be improved. The low-resistance layer can be provided on a surface of the substrate or a polysilicon interconnection.
申请公布号 US2005032315(A1) 申请公布日期 2005.02.10
申请号 US20040929782 申请日期 2004.08.31
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MORIFUJI EIJI
分类号 H01L21/3205;H01L21/00;H01L21/336;H01L21/8234;H01L23/52;H01L27/01;H01L27/04;H01L27/088;H01L29/06;H01L29/10;H01L29/40;H01L29/45;H01L29/49;H01L29/78;(IPC1-7):H01L21/336 主分类号 H01L21/3205
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