| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a step-up transformer that is compact and superior in boosting characteristics of a high-frequency high voltage induced on the secondary without generating a surface corona discharge, especially that is superior in boosting characteristics of a high-frequency high voltage induced on the secondary and generates less heat, and furthermore that is excellent in power transfer efficiency from the primary to the secondary. <P>SOLUTION: The step-up transformer is used to supply a high-frequency high voltage for turning on an excimer discharge lamp. It is provided with a plurality of walls 8 made of an insulation material between a primary winding 11 and a secondary winding 2, and gas layers 9 are provided between the walls 8. The secondary coil 2 is wound in three winding coils, namely a first coil wherein the coil is wound in an advancing direction parallel to the walls 8, a second coil wherein the coil is wound in the clearance between the existing coils each time when the coil is formed with the first coil, and the other coils wherein the first and second coils are alternately repeated and wound in the advancing direction. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
