METAL MASK HAVING MESH LAYER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal mask including a portion where a plated metal layer of an extremely thin mesh pattern and a plated metal layer of a pattern corresponding to an image are present. SOLUTION: The method includes the steps of: plating a base board with a first metal layer; developing a resist to leave the resist only in positions corresponding to mesh holes; depositing a second metal layer by plating in the region except the part where the resist remains; (plating the surface of the second metal layer with a third metal layer); removing the base board from the plating metal layer; applying a surface resist on the first (and the third) layer(s); developing the resist to leave the photoresist only in the positions except for the positions where the metal is to be removed by etching; and corroding the metal with an etching solution which does not corrode the second metal so as to remove the resist. The method also includes the steps of: preparing the base board of a metal; removing the base board by etching; attaching the layered product to a frame before removing the base board; and thickening the peripheral part of the metal mask before removing the base board. COPYRIGHT: (C)2005,JPO&NCIPI