| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate controller for realizing miniaturization, weight lightening, man-hour reduction and cost reduction. SOLUTION: This flow rate controller 1 is configured by arranging a mass flow controller 4 for rate setting and a mass flow controller 8 for adjusting a pressure in parallel so that fluid to be supplied from an upstream side can be distributed to a plurality of lines at a downstream side at a preliminarily set arbitrate rate. While pressure adjustment is carrier out, flow rate output signals a<SB>1</SB>and a<SB>2</SB>from the mass flow meters 4 and 8 are fed back, and the flow rate output signals are added, and a total flow rate output signal a<SB>1</SB>+a<SB>2</SB>is compared with a flow rate setting signal b for setting a rate R to a total flow rate by a control part 30, and a flow rate control valve 3 of the mass flow controller 4 for rate setting is configured so as to be controlled for setting the rate R based on a control signal to be outputted from the control part 30. COPYRIGHT: (C)2005,JPO&NCIPI
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