发明名称 AUTOMATIC CARRYING SYSTEM AND PASSIVE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a passive device which is capable of easily carrying out the carrier transfer sequence check of a loading port. SOLUTION: An automatic carrying system is equipped with two loading ports 3 and 5 where two optical transmission apparatuses 7 and 9 are arranged, respectively. The optical transmission apparatuses 7 and 9 are capable of communicating with each other and have a receiving I/O interface function and a transmitting I/O interface function, and the loading ports 3 and 5 have a switching means capable of switching receiving/transmitting I/O interface functions from one to the other. Furthermore, the automatic carrying system switches one of the two transmission apparatuses 7 and 9 of the loading ports 3 and 5 to a receiving I/O interface function, and switches the other of the two transmission apparatuses 7 and 9 to a transmitting I/O interface function, whereby a carrier transfer sequence check can be carried out between the loading ports. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005038902(A) 申请公布日期 2005.02.10
申请号 JP20030197310 申请日期 2003.07.15
申请人 NIKON CORP 发明人 FUJITA YOSHIYUKI
分类号 H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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