| 摘要 |
PROBLEM TO BE SOLVED: To provide a separation type distribution rotor that can be very easily separated or coupled, and that allows easy maintenance, while increasing sealing effect through a simple structure, and a horizontal type rotor distributer using the same separation type distribution rotor. SOLUTION: This distribution rotor for a horizontal type rotor distributer to distribute gas is composed of a first distribution rotor having an air purge supply opening and a processed gas discharge opening, a second distribution rotor having an unprocessed gas supply opening, an air purge supply opening, and a processed gas discharge opening, and an elastic member provided between the first distribution rotor and the second distribution rotor. Sealing efficiency is thus improved through the simple structure. COPYRIGHT: (C)2005,JPO&NCIPI
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