| 摘要 |
PROBLEM TO BE SOLVED: To obtain a fluorine atom-containing polymerizable unsaturated monomer useful for providing a polymer compound having high transmission of a vacuum ultraviolet light such as a light at≤300 nm wavelength, especially an F<SB>2</SB>excimer laser (157 nm), etc. SOLUTION: The polymerizable adamantane derivative is represented by formula (1) (R<SP>1</SP>is a fluorine atom or a fluoroalkyl group; the adamantane ring in the formula may contain a substituent group; for example, trifluoromethyl, pentafluoroethyl, 2,2,2-trifluoroethyl, 2,2,2-trifluoro-1-(trifluoromethyl)ethyl, pentafluoropropyl group or the like may be cited as the fluoroalkyl group). COPYRIGHT: (C)2005,JPO&NCIPI
|
