| 摘要 |
PROBLEM TO BE SOLVED: To provide an object levitation device capable of accurately fine-adjusting the height of a vibration body. SOLUTION: The object levitation device 1 is provided with a base plate 9 provided on a stand 7 and a vibration plate 3 arranged above the base plate 9 through an ultrasonic unit 5. A wedge-like adjusting piece 17 is arranged between the ultrasonic unit and the base plate, an upper face of the adjusting piece and a lower face of a flange part 15 formed on a lower part of the ultrasonic unit are constituted as a pair of inclined plane parts 15a and 17a respectively extended in parallel and movable with respect to each other. The height of the vibration body can be accurately fine-adjusted by varying an insertion amount of the wedge-like adjusting piece between the base plate and the ultrasonic unit. COPYRIGHT: (C)2005,JPO&NCIPI
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