Method and apparatus for compact Fabry-Perot imaging spectrometer

摘要

The disclosure generally relates to a method and apparatus for compact Fabry-Perot imaging spectrometer. More specifically, in one embodiment, the disclosure concerns a tunable Fabry-Perot optical filter for providing a spatially accurate wavelength-resolved image of a sample having two spatial dimensions. The optical filter may include plural filter elements having an initial predetermined spacing between adjacent filter elements; and a micro electromechanical system ("MEMS") actuator. One of the plural filter elements may be attached to the MEMS actuator so that the actuator is capable of moving said one filter element relative to another of said plural filter elements to thereby tune said Fabry-Perot optical filter.