| 发明名称 |
CERIUM OXIDE SLURRY FOR POLISHING, PROCESS FOR PREPARING THE SLURRY, AND PROCESS FOR POLISHING WITH THE SLURRY |
| 摘要 |
<p>A cerium oxide slurry for polishing comprising cerium oxide dispersed in water, wherein the slurry has a conductivity of about 30 c muS/cm or less when the cerium oxide concentration in the slurry is c wt. %. In order to adjust the conductivity to about 30 c muS/cm or less, cerium oxide is washed with deionized water.</p> |
| 申请公布号 |
EP1056816(B1) |
申请公布日期 |
2005.02.09 |
| 申请号 |
EP19990959933 |
申请日期 |
1999.12.21 |
| 申请人 |
SHOWA DENKO KABUSHIKI KAISHA |
发明人 |
KIDO, TAKANORI;SANBAYASHI, MASAYUKI;TSUJINO, FUMIO;ICHIKAWA, KAGETAKA |
| 分类号 |
B24B37/00;C09C1/68;C09G1/02;C09K3/14;H01L21/304;H01L21/306;(IPC1-7):C09G1/02 |
主分类号 |
B24B37/00 |
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