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发明名称
摘要
申请公布号
JP3618254(B2)
申请公布日期
2005.02.09
申请号
JP19990138326
申请日期
1999.05.19
申请人
发明人
分类号
H01L21/762;C30B29/06;H01L21/02;H01L27/12;(IPC1-7):H01L27/12
主分类号
H01L21/762
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