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发明名称
RESIST COMPOSITION
摘要
申请公布号
EP1298491(B1)
申请公布日期
2005.02.09
申请号
EP20010938643
申请日期
2001.06.13
申请人
ASAHI GLASS COMPANY LTD.
发明人
KANEKO, ISAMU;OKADA, SHINJI;KAWAGUCHI, YASUHIDE;TAKEBE, YOKO;KODAMA, SYUN-ICHI
分类号
C08L27/12;C08L29/14;G03F7/004;G03F7/039;(IPC1-7):G03F7/039;H01L21/027
主分类号
C08L27/12
代理机构
代理人
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