| 摘要 |
<p>PROBLEM TO BE SOLVED: To correctly detect defectives in an object to be inspected and improve the reliability of an apparatus even when a plurality of the objects to be inspected are stored in a storage body because the object to be inspected has a small relative area in the storage body. SOLUTION: A predetermined threshold to an X-ray transmission amount of the object W to be inspected is set to a threshold setting part 17a of a defective detecting part 17. A region of the object W to be inspected which is lower than the threshold is obtained as an area from data of the X-ray transmission amount outputted from an X-ray detector 3 by counting the number of pixels at a part 17b for extracting the object to be inspected. The obtained area is compared with a reference area by a defective judging part 17c and it is judged that the object W is a defective one when the area is lower. Even when the relative area of the object W is small to the size of the storage body T and a plurality of the objects are stored, defectives, fractures and the like of the object W can be detected, so that defective objects can be detected correctly.</p> |
