Measuring method and measuring apparatus

摘要

In a measuring apparatus (10), a plurality of design values in design values substituted in the correction computation equations for correcting a geometrical measurement error inherent in the measuring apparatus are set as variables, the variables are optimized by a numerical solution to obtain optimized correction computation equations. A measured value is computed by using the optimized correction computation equations obtained. For optimization of the variables, a master work is measured and the variables are adjusted so that a measurement error is minimized. The measuring apparatus can comprise a seesaw member. Respective design values are then eg., the distances in X and Y direction between the supporting point (13) and the contacting sphere as well as the pitch of the scale (16A) of the detector (16).