发明名称 |
OPEN/CLOSE DEVICE FOR OPEN/CLOSE LID OF UNTREATED OBJECT STORING BOX AND TREATING SYSTEM FOR UNTREATED OBJECT |
摘要 |
An opening and closing apparatus (52, 54) opens and closes an opening and closing lid (10) which closes an opening part (4) of an accommodating box (2) for accommodating an object (W) to be processed and is locked by a locking mechanism (12). A key member (26) is mounted to a base table (90) via a bearing mechanism (92) in a state in which the key member is rotatable with respect to the base table (90) and movable in a vertical direction with respect to a front surface of the base table (90). A part of the opening and closing lid (10) is held by being put between the key member (26) and an elastic member (98) provided on a front surface of the base table. Thereby, the opening and closing lid (10) is prevented from being displaced with respect to the base table (90) when the opening and closing lid (10) is removed from the accommodation box (2). <IMAGE> |
申请公布号 |
EP1195807(A4) |
申请公布日期 |
2005.02.09 |
申请号 |
EP20000944431 |
申请日期 |
2000.07.13 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
SAKATA, KAZUNARI;TANIFUJI, TAMOTSU;OGAWA, MASAHIRO |
分类号 |
B65G49/07;H01L21/673;H01L21/677 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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