发明名称 Method and system having switching network for testing semiconductor components on a substrate
摘要 A system for testing semiconductor components contained on a substrate, such as a wafer, a panel, a leadframe or a module, includes an interconnect configured to electrically engage all of the components on the substrate at the same time. The interconnect includes a switching network configured to selectively apply test signals to selected components, to electrically isolate defective components and to transmit test signals from selected groups of components. The system also includes a test apparatus, such as a wafer prober or a carrier for handling the substrate. A method for testing includes the steps of providing the interconnect having the switching network, and controlling test signals to the components using the switching network to perform various test procedures, such as functionality tests, parametric tests and burn-in tests.
申请公布号 US6853211(B2) 申请公布日期 2005.02.08
申请号 US20030633189 申请日期 2003.08.01
申请人 MICRON TECHNOLOGY, INC. 发明人 DOHERTY C. PATRICK;DE VARONA JORGE L.;AKRAM SALMAN
分类号 G01R1/073;G01R31/28;(IPC1-7):G01R31/26 主分类号 G01R1/073
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