CHAMBER CLEANING APPARATUS TO MAINTAIN DEIONIZED WATER OF ULTRA HIGH PURITY

摘要

PURPOSE: A chamber cleaning apparatus is provided to maintain D.I(deionized) water of ultra high purity by continuously circulating D.I water in a D.I water storing unit. CONSTITUTION: Supply and drain pneumatic valves(10,10-1) supply pure D.I water or drain the D.I water with worse purity. The pure D.I water is stored in a D.I storing unit(30). A water conductivity sensor detects the conductivity of the D.I water and provides a resistance value of the detected conductivity. A low level sensor detects when the D.I water stored in the D.I storing unit is at a low level, and supplies a low level signal. A high level sensor detects when the D.I water stored in the D.I storing unit is at a high level, and supplies a high level signal. An amplification sensor(50) amplifies the low and high level signals supplied from the low and high level sensors to serially transmit/receive the amplified level signals and outputs the amplified level signals to a PLC(programmable-logic-controller). An LED(light-emitting-diode) panel(60) emits light of different colors according to the resistance value of the conductivity while outputting the resistance value of conductivity to the PLC. A solenoid valve(20) is provided with the resistance value of conductivity of the D.I water from the PLC, receives an electronic signal to drain the D.I water with worse purity so that the drain pneumatic valve is opened, and receives an electronic signal to provide the D.I water with purity of the resistance value of conductivity so that the supply pneumatic valve is opened.