ISOLATION VALVE TO MONITOR STATE OF BELLOWS AND O-RING WITHOUT DISASSEMBLING VALVE

摘要

PURPOSE: An isolation valve is provided to monitor the state of a pair of bellows and an O-ring without disassembling an isolation valve by installing a transparent window in a valve body such that the inside of the isolation valve can be monitored through the transparent window. CONSTITUTION: An isolation valve selectively connects a vacuum pump for generating a vacuum pressure with a reactor using a vacuum pressure, installed between the vacuum pump and the reactor using a vacuum pressure. The valve body(10) in which a valve axis is installed has a transparent window(36) through which the bellows(18) is monitored from the outside of the valve such that the bellows are installed outside the valve axis and makes a stretch/contraction.