| 摘要 |
PURPOSE: An apparatus and a method for testing a substrate are provided to avoid transfer delay of substrates following the substrate under test by making it possible to move the substrates continuously while the substrate is tested. CONSTITUTION: A movement part(220) moves a plurality of substrates(241,242) sequentially fed onto the movement part. A test part(210), located over the movement part, irradiates light to a test target substrate of the substrates so as to perform a test operation. A lifter(230), located at the opposite side of the test part, pulls up and down the test target substrate. The movement part is comprised of a plurality of conveyors.
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