APPARATUS OF FABRICATING SEMICONDUCTOR TO DETERMINE LOCATION OF WAFER ON ESC

摘要

PURPOSE: An apparatus of fabricating a semiconductor is provided to determine the location of a wafer on an ESC(Electro-Static Chuck) by using temperature detected from each part of the wafer. CONSTITUTION: A heater(30) is used for heating a wafer located on an ESC at a constant temperature. A sensor(32) is used for detecting a temperature of the wafer heated by the heater. A controller(34) is used for determining the location of the wafer on the ESC by using the detected temperature of the wafer and outputting a control signal to maintain constantly the temperature of the wafer. A chiller(36) is used for chilling the wafer according to the control signal of the controller.