ION BEAM ACCELERATING APPARATUS TO PREVENT ABILITY OF PUMP FROM BEING DEGRADED BY INTRODUCTION OF HIGH PRESSURE OUTER GAS

摘要

PURPOSE: An ion beam accelerating apparatus is provided to prevent the ability of a turbo pump from being degraded by introduction of high pressure outer gas by operating the turbo pump at an atmospheric pressure. CONSTITUTION: A predetermined space is formed in a chamber(11) having a high pressure atmosphere. A beam line(12) passes through the chamber to form a transfer path of impurity ions. The first and second accelerators(13,14) are installed at both sides of the beam line, separated from each other by a predetermined interval. A stripper(15) of a pipe type is installed in the beam line positioned between the first and second accelerators. A gas supply line(16) supplies predetermined gas to the stripper. A turbo pump(17) circulates the stripping gas supplied through the gas supply line, installed in the gas supply line. A turbo pump protection unit(21) protects the turbo pump from the high pressure in the chamber.