| 摘要 |
PURPOSE: A method and an apparatus for transacting a wafer are provided to select a wafer to be exchanged according to objective information. CONSTITUTION: An apparatus(100) for transacting a wafer comprises an unloading unit(120) and a carrier exchanging unit(140). The wafer finished an appropriate process is received to a carrier(C) by the unloading unit. Before reception, a worn-out one among carriers placed on the unloading unit is selected and exchanged with a new carrier by the carrier exchanging unit formed adjacent to the unloading unit. The carrier exchanging unit includes a judge unit, a storage unit(148), input port(149b) and a first transfer robot(146).
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