| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer loader that is shortened in transporting time when transporting a wafer to an aligner, and to provide an aligner provided with the wafer loader. SOLUTION: In a pre-alignment chamber 10, a heater 13 and a temperature sensor 15 are provided and the inside of the chamber 10 is maintained at a temperature which is higher than the atmospheric temperature by 2-3°C. While the wafer W is pre-aligned in the chamber 10, the temperature of the wafer W is raised to a value higher than the atmospheric temperature. Consequently, in drawing a load-lock chamber 27 to a vacuum, the wafer W is not deformed, because the temperature of the wafer W roughly becomes the original one even when the temperature is lowered due to the adiabatic expansion of a gas. In addition, since the temperature of the wafer W is raised while the wafer W is pre-aligned, it is not required to separately provide any temperature raising time for the wafer W. COPYRIGHT: (C)2005,JPO&NCIPI
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