| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an energy monitoring method and an energy monitoring device where the reliability in laser beam machining can be improved by monitoring whether divergence is normally performed or not. <P>SOLUTION: In the laser beam machining device where an object 8 for machining is irradiated with laser beams diverged using a divergence unit 28, the energy of at least either laser beam after the divergence is monitored. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
