发明名称 RETAINING METHOD OF OPTICAL MEMBER MADE OF CUBIC SINGLE CRYSTAL MATERIAL, OPTICAL SYSTEM, EXPOSURE DEVICE AND EXPOSURE METHOD
摘要 PROBLEM TO BE SOLVED: To provide a retaining method capable of retaining an optical member at an appropriate part by considering sliding of a crystal surface in a cubic single crystal substance like fluorite, for example, upon heat treatment and, moreover, suppressing distortion of the optical member caused by the sliding of the crystal surface. SOLUTION: The optical member is retained in the state that the crystal orientation (100) of the optical member is allowed to coincide with an optical axis O of the optical member upon the heat treatment etc. of the optical member 31 formed by the cubic single crystal substance. Therein, the optical member is retained on at least three outer peripheral part regions substantially apart from four specified outer peripheral part regions 34 of the optical member located in the direction of the crystal orientation (010) of the optical member. Concretely, the optical member is retained on almost an intermediate region 35 along the outer peripheral direction of two adjacent specified outer peripheral part regions of the four specified outer peripheral part regions. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005031226(A) 申请公布日期 2005.02.03
申请号 JP20030194173 申请日期 2003.07.09
申请人 NIKON CORP 发明人 WATANABE SHUNJI
分类号 G02B7/00;G03F7/20;H01L21/027;(IPC1-7):G02B7/00 主分类号 G02B7/00
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