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发明名称
Rastersondenmikroskop
摘要
申请公布号
DE69822562(T2)
申请公布日期
2005.02.03
申请号
DE1998622562T
申请日期
1998.07.08
申请人
JEOL LTD., AKISHIMA
发明人
KITAMURA, SHINICHI;SUEYOSHI, TAKASHI
分类号
G01B7/34;G01B7/00;G01N27/00;G01N37/00;G01Q60/24;G01Q60/30;G01Q60/32;(IPC1-7):G01B7/34;G01N27/22
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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