| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing system wherein data about semiconductor design, manufacture, and inspection are dealt with seamlessly. <P>SOLUTION: The semiconductor manufacturing system has memory devices 3000-3003 wherein all data about semiconductor design, semiconductor manufacture, and semiconductor inspection are stored as classes of instances each provided with metadata describing roles of the data in a logically stated form; and a storage area network 2000 wherein the memory devices 3000-3003, semiconductor manufacturing apparatuses 4000 and 4001, and a semiconductor inspecting apparatus 4002 are connected with one another. The memory devices 3000-3003 are seamlessly accessible from the semiconductor manufacturing apparatuses 4000 and 4001, the semiconductor inspecting apparatus 4002, and a semiconductor design environment. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
