| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device which is capable of optionally unloading a substrate that is half processed for transferring, and to provide a substrate processing method. SOLUTION: A single cell is each composed of a processing unit for processing a substrate and a main transfer mechanism for loading or unloading a substrate to or from the processing unit, and the substrate processing device is composed of the cells disposed in an array. When it is detected that faults occur, abortion of processing is carried out to stop an operation of processing the substrate related to the above faults after the faults are detected and to unload the substrate from the processing unit for transferring. In the abortion of processing, the substrates related to the faults are transferred among the unit cells and finally contained in the cassette of the indexer cell C1. By transfer control as mentioned above, the substrates which are half processed and related to faults are optionally unloaded from the processing units for transferring. COPYRIGHT: (C)2005,JPO&NCIPI
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