发明名称 ULTRASONIC TRANSDUCER, ULTRASONIC PROBE, AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a cutting method by which a domain hardly occurs in a cutting process, an ultrasonic transducer which can sufficiently exert a function using the cutting method, and an ultrasonic probe. <P>SOLUTION: In the cutting method for a KNbO<SB>3</SB>single crystal substrate, the dicing direction is not parallel with a Y-axis in a process of dicing a substrate into a bar-shape or a lattice shape to the plate-like substrate, and the plate-like substrate is cut from the KNbO<SB>3</SB>single crystal with a crystal coordinate system (X, Y, and Z), in which the spontaneous polarization direction is set as a Z-axis and an axis with the minimum lattice constant is set as the Y-axis. Also, in the ultrasonic transducer, the end face at a single crystal part of the transducer is not parallel with the Y-axis in the ultrasonic transducer utilizing a thickness longitudinal vibration mode in the KNbO<SB>3</SB>single crystal with the crystal coordinate system (X, Y, and Z), in which the spontaneous polarization direction is set as the Z-axis and the axis with the minimum lattice constant is set as the Y-axis. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005033660(A) 申请公布日期 2005.02.03
申请号 JP20030272608 申请日期 2003.07.09
申请人 MITSUI CHEMICALS INC 发明人 HIROHASHI JUNJI;KAMIO HIROYUKI;YAMADA KAZUHIRO
分类号 H01L41/18;H01L41/22;H01L41/338;H03H3/02;H03H9/17 主分类号 H01L41/18
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