| 摘要 |
PROBLEM TO BE SOLVED: To reduce a thrust resistance or a thrust disturbance resulting from a preload magnet on a static pressure stage. SOLUTION: This static pressure stage used for a scanning exposure device comprises a first stage movable on a surface plate in the first direction along a first guide provided on the surface plate; a second stage movable on the surface plate in the second direction intersecting the first direction along a second guide provided on the first stage; a first and a second fluid static pressure preload means which are provided on the first and the second stage, and which make the respective first and second stage float on the surface plate; and a first and a second preload magnet which are provided on the first and the second stage, and which suck the first and the second stage to the surface plate, respectively. The surface plate is made from a low carbon iron system material. The first and the second preload magnet are constituted so that respective plural rectangle magnet pieces are arranged in one-dimension, mutually in contact with their sides. The direction along the one-dimensional alignment of the magnet pieces which constitute the second preload magnet is orthogonal to the step direction. COPYRIGHT: (C)2005,JPO&NCIPI |
