| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder which extends the interval of cleaning the substrate holder and saves time and manpower for cleaning, though the substrate holder is washed every time after a film-forming operation has been repeated several times, because particle dust having exfoliated from it causes a defective product. SOLUTION: The substrate holder for holding a substrate in a film-forming apparatus has a recess formed thereon so as to bury/hold the substrate, and has a plurality of grooves formed on the faces out of those to be film-formed and other than the recess on the substrate holder. COPYRIGHT: (C)2005,JPO&NCIPI |
